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In-line Inspection of P1-P3 Scribes in CIGS Solar Cell Substrates by using Laser Plasma Spectroscopy

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Abstract

We use plasma spectroscopy to monitor depths of P1-P3 laser scribes in CIGS substrates and determine the electron temperature and density of ejected CIGS plasma by in-line analysis of spectral emission lines of selected elements.

© 2013 Optical Society of America

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