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Excimer Laser Annealing for LTPS on Large Glass Substrates

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Abstract

Low-Temperature Polycrystalline Silicon (LTPS) is the enabling backplane technology for AMOLED displays and small to medium sized high-resolution AMLCDs. Progress on Excimer Laser Annealing towards large-scale production of LTPS is described.

© 2015 Optical Society of America

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