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Conferences > CLEO_AT > 2015 > ATh4A > ATh4A.3

Hybrid Subtractive and Additive Micromanufacturing using Femtosecond Laser for Fabrication of True 3D Biochips

Koji Sugioka, Dong Wu, Jian Xu, Felix Sima, and Katsumi Midorikawa

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Abstract

We propose conjugation of subtractive and additive 3D manufacturing using femtosecond laser for fabrication of functional biochips. Specifically, femtosecond laser 3D glass micromachining followed by two-photon polymerization are performed to realize true 3D biochips.

© 2015 Optical Society of America

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