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MEMS-based Deformable Mirrors in Industrial Laser Systems

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Recent advancements in MEMS deformable mirrors (DM) make them suitable for use in industrial laser systems. This paper presents results from DMs used to improve beam quality and beam-steering/shaping. It also describes methods to improve power handling and longevity that led to successful 1000-hour operational testing of a 3.5 mm aperture PTT111 MEMS DM while exposed to up to 17 W of UV laser power.

© 2016 Optical Society of America

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