Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

MEMS-based Deformable Mirrors in Industrial Laser Systems

Not Accessible

Your library or personal account may give you access

Abstract

Recent advancements in MEMS deformable mirrors (DM) make them suitable for use in industrial laser systems. This paper presents results from DMs used to improve beam quality and beam-steering/shaping. It also describes methods to improve power handling and longevity that led to successful 1000-hour operational testing of a 3.5 mm aperture PTT111 MEMS DM while exposed to up to 17 W of UV laser power.

© 2016 Optical Society of America

PDF Article
More Like This
MEMS Deformable Mirrors: From Retinal Imaging to Industrial Laser Systems

Michael Helmbrecht
ATu2A.2 Applied Industrial Optics: Spectroscopy, Imaging and Metrology (AIO) 2012

Polynomial Control of MEMS Deformable Mirrors

Yaopeng Zhou, Thomas G. Bifano, Daniel Sumorok, Stephen A. Burns, and Remy Tumbar
FThZ4 Frontiers in Optics (FiO) 2005

Experimental investigation of a thermo-field bimetal deformable mirror with aluminum base

Lei Huang, Meng Yan, Qi Bian, Chenlu Zhou, and Mali Gong
JT3A.71 3D Image Acquisition and Display: Technology, Perception and Applications (3D) 2016

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved