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Conferences > CLEO_AT > 2016 > ATh1K > ATh1K.7

Adhesion mechanism between laser sputtered Aluminum nano particles on Si-Wafer by Nd:YAG laser

M. H. Azhdast, H.J. Eichler, K.-D. Lang, and V. Glaw

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Abstract

In this research, different laser parameters is investigated using Nd:YAG Picosecond laser to sputter nano particles on Si-Wafer substrate. Furthermore, the influence of various parameters on adhesion tests and mechanism of deposited layer is studied.

© 2016 Optical Society of America

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