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Optomechanical Oscillators Fabricated in a CMOS-compatible Foundry

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We demonstrate self-sustained mechanical oscillations at room temperature and ambient pressure in a silicon photonic crystal slot-cavity fabricated by a CMOS-Foundry. Optical quality factor as high as Qopt = 4 × 105 and an optomechanical coupling rate of g0/2π = 76 kHz are observed.

© 2016 Optical Society of America

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