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Conferences > CLEO_AT > 2016 > JTh2A > JTh2A.99

Optomechanical Oscillators Fabricated in a CMOS-compatible Foundry

Rodrigo Benevides, Gustavo O. Luiz, Felipe G. S. Santos, Gustavo S. Wiederhecker, and Thiago P. Mayer Alegre

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Abstract

We demonstrate self-sustained mechanical oscillations at room temperature and ambient pressure in a silicon photonic crystal slot-cavity fabricated by a CMOS-Foundry. Optical quality factor as high as Qopt = 4 × 105 and an optomechanical coupling rate of g0/2π = 76 kHz are observed.

© 2016 Optical Society of America

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