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Conferences > CLEO_AT > 2016 > JTh4C > JTh4C.3

Multilayer Silicon Nitride-on-Silicon Integrated Photonic Platform for 3D Photonic Circuits

Wesley D. Sacher, Zheng Yong, Jared C. Mikkelsen, Antoine Bois, Yisu Yang, Jason C. C. Mak, Patrick Dumais, Dominic Goodwill, Chaoxuan Ma, Junho Jeong, Eric Bernier, and Joyce K. S. Poon

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Abstract

A photonic platform with two passive silicon nitride layers atop an active silicon layer is demonstrated. It supports ultra-low loss (< 0.003dB) and crosstalk (< −52dB) crossings and efficient depletion modulation diodes with VπL of 2.6 V-mm.

© 2016 Optical Society of America

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