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Holographic Spherical Concave Grating Astigmatism Correction by Cylindrical Recording Wave for Rowland Circle Mounting

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Abstract

We propose an exposure system of fabricating concave gratings by using a cylindrical wave and a plane wave. The defocus of recorded grating is kept zero and the astigmatism is sharply reduced in Rowland-circle mounting.

© 2016 Optical Society of America

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