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Conferences > CLEO_AT > 2017 > JTu5A > JTu5A.12

Deposition of Al and Cu nanoparticles on Silicon Wafer using a Picosecond Nd:YAG Laser: An Experiment-based Parameter Optimization Guide

M. H. Azhdast, M. Kossatz, H. J. Eichler, K.-D. Lang, and V. Glaw

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Abstract

The optimization of parameters for laser deposition of nanoparticles on Si-wafer is studied. The threshold of laser energy, pulses per laser shot and overlapping is crucial in order to achieve the best deposition results.

© 2017 Optical Society of America

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