Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Preserving Optical Confinement in Unannealed PECVD SiO2 Waveguides

Not Accessible

Your library or personal account may give you access


Rib and buried channel waveguides (BCWs) made of unannealed PECVD SiO2 were studied after exposure to high humidity. Low stressed rib waveguides had lower optical throughput change, while high index difference BCWs were practically unaffected.

© 2017 Optical Society of America

PDF Article
More Like This
Deposition and Characterization of DLC/SiO2 Nanocomposite Prepared by Ion-Assisted PECVD

Jung H. Lee, Dong S. Kim, Young H. Lee, and Bakhtier Farouk
CDLC727 Applications of Diamond Films and Related Materials (DFM) 1995

Large Mode-Field-Diameter Surface Optical Coupler Based on SiO2-Capsuled Vertically Curved Si Waveguide

Y. Atsumi, T. Yoshida, E. Omoda, and Y. Sakakibara
Th2A.8 Optical Fiber Communication Conference (OFC) 2017

Silicate Spin-on-Glass as an Overcoat Layer for SiO2 Ridge Waveguides

Matthew A. Stott, Thomas A. Wall, Damla Ozcelik, Joshua W. Parks, Gopikrishnan G. Meena, Erik Hamilton, Roger Chu, Holger Schmidt, and Aaron R. Hawkins
JTh2A.29 CLEO: Applications and Technology (CLEO:A&T) 2015

Poster Presentation

Media 1: PDF (1281 KB)     
Select as filters

Select Topics Cancel
© Copyright 2023 | Optica Publishing Group. All Rights Reserved