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Preserving Optical Confinement in Unannealed PECVD SiO2 Waveguides

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Abstract

Rib and buried channel waveguides (BCWs) made of unannealed PECVD SiO2 were studied after exposure to high humidity. Low stressed rib waveguides had lower optical throughput change, while high index difference BCWs were practically unaffected.

© 2017 Optical Society of America

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