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Silicon Based Photonic Crystal Nanobeam Cavity with Polymer Cladding

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Abstract

Silicon based photonic crystal nanobeam cavities with polymer cladding have been investigated. We experimentally demonstrate the temperature insensitive photonic crystal (PhC) nanobeam cavity, the post-trimming of the PhC cavity and a high-sensitivity temperature sensor, respectively.

© 2017 Optical Society of America

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