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Silicon On-chip Ultracompact Integrated Sensor Array Based on High-Q Photonic Crystal Nanobeam Cavities with Very Large Free Spectral Range

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We present a novel method for multiplexed on-chip integrated sensor-array, which are based on ultracompact one-dimensional photonic-crystal nanobeam cavities with ultrahigh-Q and very large-free-spectral-range (LFSR, ~200nm). The high refractive-index sensitivities of 166.4nm/RIU can be achieved.

© 2017 Optical Society of America

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Poster Presentation

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