Regularized Phase Reconstruction for Sensing Deep Subwavelength Perturbations on Large-Scale Wafers

Jinlong Zhu; Lynford L. Goddard

doi:10.1364/CLEO_AT.2019.ATh1K.5

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2019),
paper ATh1K.5
•https://doi.org/10.1364/CLEO_AT.2019.ATh1K.5

Regularized Phase Reconstruction for Sensing Deep Subwavelength Perturbations on Large-Scale Wafers

Jinlong Zhu and Lynford L. Goddard

CLEO: Applications and Technology 2019

San Jose, California United States
5–10 May 2019
ISBN: 978-1-943580-57-6

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Industrial Metrology & Remote Sensing (ATh1K)

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J. Zhu and L. L. Goddard, "Regularized Phase Reconstruction for Sensing Deep Subwavelength Perturbations on Large-Scale Wafers," in Conference on Lasers and Electro-Optics, OSA Technical Digest (Optica Publishing Group, 2019), paper ATh1K.5.

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Abstract

We demonstrate that deep subwavelength scale perturbations on large-scale wafers can be inspected using a regularized phase metrology method. This work paves the route to reference-free defect inspection for nanostructures at advanced technology nodes.

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