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CO2 Detection with Si Slot Waveguide Ring Resonators toward On-chip Specific Gas Sensing

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Abstract

We fabricated a Si slot waveguide ring resonator detecting CO2 with RI difference of 1.5×10−4 and sensitivity of 3×102 nm/RIU. The device satisfies both detecting capability and compatibility with biolayer toward on-chip specific gas sensing.

© 2019 The Author(s)

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