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Electronic-Photonic Platform for Label-Free Biophotonic Sensing in Advanced Zero-Change CMOS-SOI Process

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Abstract

We propose a monolithically integrated platform in a CMOS 45RFSOI process for biophotonic sensing. This platform opens the pathway to the first Lab-on-Chip system with nanophotonic sensing and advanced electronics on a single die.

© 2019 The Author(s)

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Poster Presentation

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