Author Affiliations

Zhaoyi Li,¹ Peng Lin,³ Yao-Wei Huang,^1,4 Joon-Suh Park,¹ Wei Ting Chen,¹ Zhujun Shi,^1,2 Ji-Xin Cheng,^3,4 and Federico Capasso^1,*

¹Harvard John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, MA, USA.

²Department of Physics, Harvard University, Cambridge, MA, USA.

³Department of Electrical and Computer Engineering, Boston University, Boston, MA, USA.

⁴Department of Biomedical Engineering, Boston University, Boston, MA, USA.

^*Corresponding author: capasso@seas.harvard.edu