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Conferences > CLEO_AT > 2020 > ATu4K > ATu4K.5

Thermal Compensation for High Load Spatial Light Modulators in Real-Time

Peter J. Christopher, Ralf Mouthaan, Andrew Kadis, Nadeem Gabbani, William O’Neill, and Timothy D. Wilkinson

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Abstract

We introduce a concurrent real-time calibration process for diffractive lithography using liquid crystal spatial light modulators. This allows for increased power handling capabilities for given phase modulation accuracy.

© 2020 The Author(s)

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