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Fabrication of waveguide-integrated suspended chalcogenide glass microdisk resonator

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Abstract

We have demonstrated a waveguide-integrated suspended Geii.5As24Se64.5 microdisk with intrinsic quality factor of 1*106, which is the highest figure, to the best of our knowledge, with respect to reported thus far in suspended chalcogenide resonators.

© 2020 The Author(s)

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