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Conferences > CLEO_AT > 2021 > JW1A > JW1A.65

Optical Nano-Metrology of Sub-Wavelength Objects Enabled by Artificial Intelligence

Carolina Rendón-Barraza, Eng Aik Chan, Guanghui Yuan, Giorgio Adamo, Tanchao Pu, and Nikolay I. Zheludev

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Abstract

We experimentally demonstrate that a linear dimension of a sub-wavelength nanoscale object can be measured with an accuracy better that λ/250 by a deep-learning-enabled examination of its diffraction pattern.

© 2021 The Author(s)

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