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Conferences > CLEO_AT > 2022 > AM2C > AM2C.1

Silicon Nitride Process for Mode-Orthogonal MEMS-Tunable Photonic Devices

Nathnael S. Abebe, Sunil Pai, Payton Broaddus, Rebecca L. Hwang, Yu Miao, and Olav Solgaard

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Abstract

We report a silicon-photonics process for MEMS-tunable phase shifters that leverages orthogonal optical modes. A phase shifter with -0.63dB insertion loss and π phase shift and a preliminary tunable directional coupler are demonstrated.

© 2022 The Author(s)

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