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Conferences > CLEO_AT > 2022 > AM2C > AM2C.4

1D Beam Steering by a Waveguide-Integrated MEMS Cantilever in the Visible Spectrum

Saeed Sharif Azadeh, Jason C. C. Mak, Hong Chen, Xianshu Luo, Fu-Der Chen, Hongyao Chua, Guo Qiang Lo, Wesley D. Sacher, and Joyce K. S. Poon

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Abstract

We demonstrate one-dimensional beam steering in the visible spectrum using an electro-thermally actuated waveguide-integrated MEMS cantilever. A 24° scan range, 29 mW power consumption, and resonant scan rate of 4.74kHz were achieved at a fixed wavelength.

© 2022 The Author(s)

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