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Chip- and Wafer-Scale Manufacturing of High-Power Membrane-External-Cavity Surface-Emitting Laser Gain Elements

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Abstract

We describe the manufacturing of high-power membrane-external-cavity surface-emitting laser (MECSEL) gain elements. This process leverages low-temperature direct bonding to combine multi-quantum-well active regions with single-crystal SiC heatspreaders, yielding output powers >20 W at 1178 nm.

© 2022 The Author(s)

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