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All-Glass, Mass-Producible, Large-Diameter Metalens at Visible Wavelength for 100 mm Aperture Optics and Beyond

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We present a mass-producible, all-glass, 100 mm diameter metalens working at visible wavelengths manufactured using deep-ultraviolet projection lithography, overcoming the intrinsic exposure size limit of the lithography tool.

© 2022 The Author(s)

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