Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

All-Glass, Mass-Producible, Large-Diameter Metalens at Visible Wavelength for 100 mm Aperture Optics and Beyond

Not Accessible

Your library or personal account may give you access

Abstract

We present a mass-producible, all-glass, 100 mm diameter metalens working at visible wavelengths manufactured using deep-ultraviolet projection lithography, overcoming the intrinsic exposure size limit of the lithography tool.

© 2022 The Author(s)

PDF Article
More Like This
Large-area, single material metalens in the visible: An approach for mass-production using conventional semiconductor manufacturing techniques

Joon-Suh Park, Shuyan Zhang, Alan She, Wei-Ting Chen, Kerolos M. A. Yousef, and Federico Capasso
STh1O.5 CLEO: Science and Innovations (CLEO_SI) 2019

Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography

Lidan Zhang, Shengyuan Chang, Xi Chen, Yimin Ding, Md Tarek Rahman, Yao, Duan, Pavel Terekhov, and Xingjie Ni
FF2D.4 CLEO: QELS_Fundamental Science (CLEO_QELS) 2022

Large-area Metalens Directly Patterned on a 12-inch Glass Wafer using Immersion Lithography for Mass Production

Qize Zhong, Yuan Dong, Dongdong Li, Nanxi Li, Ting Hu, Zhengji Xu, Yanyan Zhou, Keng Heng Lai, Yuan Hsing Fu, Vladimir Bliznetsov, Hou-Jang Lee, Wei Loong Loh, Shiyang Zhu, Qunying Lin, and Navab Singh
Th2A.8 Optical Fiber Communication Conference (OFC) 2020

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved