Abstract
We demonstrate a system for implantable nanophotonic neural probes with custom packaging and peripherals. The probes, which were manufactured on 200mm Si wafers, monolithically integrate SiN waveguides with TiN electrophysiology electrodes and were tested in vivo.
© 2022 The Author(s)
PDF Article | Presentation VideoMore Like This
Xin Mu, Fu-Der Chen, Ka My Dang, Michael G. K. Brunk, Jianfeng Li, Hannes Wahn, Andrei Stalmashonak, Peisheng Ding, Xianshu Luo, Guo-Qiang Lo, Joyce K. S. Poon, and Wesley D. Sacher
cl_1_2 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2023
Tianyuan Xue, Andrei Stalmashonak, Peisheng Ding, Wesley D. Sacher, and Joyce K. S. Poon
cl_1_3 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2023
Ankita Sharma, Alperen Govdeli, Tianyuan Xue, Fu-Der Chen, Xianshu Luo, Hongyao Chua, Guo-Qiang Lo, Wesley D. Sacher, and Joyce K.S. Poon
SF2E.5 CLEO: Science and Innovations (CLEO:S&I) 2023