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Implantable Neural Probe System for Patterned Photostimulation and Electrophysiology Recording

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Abstract

We demonstrate a system for implantable nanophotonic neural probes with custom packaging and peripherals. The probes, which were manufactured on 200mm Si wafers, monolithically integrate SiN waveguides with TiN electrophysiology electrodes and were tested in vivo.

© 2022 The Author(s)

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