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Conferences > CLEO_AT > 2022 > JW3B > JW3B.180

Location resolved internal structure identification and defect detection in PIC chips with optical coherence domain reflectometer

Shengbao Wu, Jinxin Hao, Xiaojun Chen, and X. Steve Yao

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Abstract

We explore using a coherence domain reflectometry (OCDR) we developed to probe the inside of PIC chips. With clean and sharp reflection peaks having a spatial resolution down to 3 μm in Si, OCDR has the potential to detect and locate defects or anomalies inside PIC chips.

© 2022 The Author(s)

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