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Thermal-tuning of Amorphous Silicon Carbide Nanophotonic Devices

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Abstract

We experimentally demonstrate thermally tunable nanophotonic devices in amorphous-silicon carbide-on-insulator integrated platforms. The resonant wavelength of the microring resonators and the bandgap of the two-dimensional photonic crystal waveguides are tuned, based on the thermo-optic effect.

© 2022 The Author(s)

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