Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

A Maskless Lithography System Based on Digital Micromirror Devices (DMD) and Metalens Arrays

Not Accessible

Your library or personal account may give you access

Abstract

In a novel maskless lithography system, a metalens array focuses the light from assigned micromirrors to expose the photoresist. Arbitrary high-resolution patterning on the photoresist can be achieved.

© 2023 The Author(s)

PDF Article
More Like This
Maskless Lithography using Diffractive-Optical Arrays

Raiesh Menon, Michael Walsh, Mathias Galus, David Chao, Amil Patel, and Henry I. Smith
FWU5 Frontiers in Optics (FiO) 2005

Digital Micromirror Devices (DMDs) in Microscopic and Macroscopic Imaging

Calum MacAulay, Andrew Dlugan, and Pierre Lane
SuG4 Biomedical Optical Spectroscopy and Diagnostics (BIOMED) 2000

Holographic Display with a Digital Micromirror Device (DMD) and Error Diffusion Algorithm

Shuming Jiao, Dongfang Zhang, Chonglei Zhang, Yang Gao, Ting Lei, and Xiaocong Yuan
DTh7C.2 Digital Holography and Three-Dimensional Imaging (DH) 2021

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.