Direct Down-sampled Full-field Coherence Scanning Interferometry Using a Femtosecond Laser

Liheng Shi; Jinxu Zhang; Guanhao Wu

doi:10.1364/CLEO_AT.2023.AW4K.7

CLEO 2023
Technical Digest Series (Optica Publishing Group, 2023),
paper AW4K.7
•https://doi.org/10.1364/CLEO_AT.2023.AW4K.7

Direct Down-sampled Full-field Coherence Scanning Interferometry Using a Femtosecond Laser

Liheng Shi, Jinxu Zhang, and Guanhao Wu

CLEO: Applications and Technology 2023

San Jose, CA United States
7–12 May 2023
ISBN: 978-1-957171-25-8

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Optical Material and Device Characterization (AW4K)

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L. Shi, J. Zhang, and G. Wu, "Direct Down-sampled Full-field Coherence Scanning Interferometry Using a Femtosecond Laser," in CLEO 2023, Technical Digest Series (Optica Publishing Group, 2023), paper AW4K.7.

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Abstract

A down-sampled coherence scanning interferometer is realized by using a repetition frequency scanning femtosecond laser. With the fast stepwise scanning mechanism, it can realize full-field three-dimensional measurement with high signal-to-noise ratio in a few frames.

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