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Laser diagnostics of surface and film properties by surface acoustic wave pulses

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Abstract

Surface Acoustic Wave (SAW) pulses were excited by a frequency-trippled pulsed Nd:YAG laser of 200 ps pulse duration. The 355-nm radiation from this laser was focused onto the surface by a cylindrical three-lens-objective. In this way, a line focus of about 7 μm width and 7 mm length was formed. The total pulse energy in the line focus was typically 10 to 1000 μJ. This line focus could be scanned across the sample with a precision of better than 1 μm.

© 1994 IEEE

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