Abstract

Nowadays, short-pulse laser systems based on the chirped pulse amplification (CPA) technique are available, allowing a variation of the pulse duration from about 100 fs to several ns without changing other important beam parameters. Therefore, more detailed analysis of fundamental interaction processes of laser pulses with solids become feasible. These investigations can result in a significant improvement of the achievable precision and resolution of laser-based material processing and microstmcturing.

© 1996 IEEE