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Aspects of a 1 kW, 1 kHz XeCl-laser with prospect to industrial applications.

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Abstract

Before excimer lasers can be implemented in large scale industrial production lines the performance of these lasers has to be proven. The 1kW, 1kHz-laser is being developed for such industrial applications. The X-ray pre-ionised laser operates in the resonant overshoot mode with a spiker sustainer circuit including a magnetic pulse compressor [1].

© 1996 IEEE

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