Abstract
Radio frequency (RF) excited waveguide, as well as free space carbon dioxide (CO2) lasers have received in the last years intensive development [1-4]. The waveguide CO2 lasers were improved from all-ceramic channel structures to metal-ceramic channel and planar ones, which supply better cooling of active laser medium and the most widely used now. But the selection of ceramic is very limited, or alumina, or oxide beryllium, which are expensive and the last besides toxic in operation.
© 1996 IEEE
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