Abstract

At the present time the most commonly encountered KrF/XeCl industrial laser have a maximum of stabilized average power ≈200 W. As an average power and a reliability of these lasers will be increased the economic profit of their application in many technologies is doing obvious. In order to construct next generation of industrial excimer lasers with level of stabilized average power ≈500 W we have developed compact KrF and XeCl lasers with maximum of an average power ≈600 W. Both lasers have the same gas-flow system design. It employs a 120 mm diameter 900 mm long cross-flow fan provided gas velocity ≈45 m/s at interelectrode gap (H) ≈37 mm or 22 m/s at H=70 mm. Excitation systems includes UV preionization systems bazed on sparks or creeping discharge on dielectric (sapphire) surface, electrode structure and LC-inverter and double or three-stages of pulse magnetic compression.

© 1998 IEEE