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Hybrid integration of semiconductor optical amplifier gates (SOAGs) onto a silica based planar lightwave circuit (PLC) platform is one of the most suitable way to realize a matrix optical switch with high extinction ratio and nanosecond switching time. For the hybrid integration, it is highly desired that V-grooves for optical fiber assembly and signal transmission lines can be formed on a PLC platform with high quality optical circuits. In this paper, we demonstrate the successful operation of a hybrid integrated 4x4 matrix optical switch module. The PLC platform, with V-grooves for optical fiber assembly, and signal transmission lines, has been fabricated by low temperature process of TEOS/O3
© 1998 IEEE
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