Abstract

Pulsed sources of ultraviolet radiation are attractive for a growing number of applications, ranging from trace gas monitoring with extremely high sensitivity to micromachining of highly integrated electronic devices. The pulse to pulse stability of laser parameters like output energy, peak power and pulse width required by these applications is ideally fulfilled by laser sources emitting on a single optical frequency. This can be achieved by subsequent frequency doubling and quadrupling of diode pumped solid state lasers with high stability.

© 1998 IEEE