Abstract

Lithium niobate (LiNbO₃) is a promising substrate material for applications in integrated optics because of its outstanding electrooptical and acustooptical properties. Channel waveguides are the basis for integrated circuits. Guides for infrared light around the telecommunication wavelength 1550 nm are of particular interest. In this contribution, we investigate monomode channel waveguides for 1550 nm fabricated in lithium niobate by successive indiffusion of titanium stripes and thin evaporated layers of copper. The diffusion time is long enough to ensure a constant copper concentration c_Cu in the channels. Different doping levels ranging from c_Cu = 1.1 to 5.7×10²⁵ m⁻³ are investigated.

© 2000 IEEE