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In the last few years, depth profiling using a time-of-flight (TOF) system utilising the time-correlated single-photon counting has been successfully demonstrated [1,2]. Previous work [1,2] used the TOF system for very accurate scanning of surfaces at very short range (i.e. approximately 20μm depth resolution at 2m) as shown in Fig. 1.
© 2000 IEEE
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