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Optica Publishing Group
  • CLEO/Europe and IQEC 2007 Conference Digest
  • (Optica Publishing Group, 2007),
  • paper CH4_2

Infrared Mapping of Material and Doping Contrasts in Microelectronic Devices at Nanoscale Spatial Resolution

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Abstract

We demonstrate that infrared scattering-type scanning near-field optical microscopy (s-SNOM) [1] allows mapping of different materials and electron concentrations in cross-sectional samples of industrial integrated circuit device structures at nanoscale spatial resolution.

© 2007 IEEE

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