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Optica Publishing Group
  • CLEO/Europe and IQEC 2007 Conference Digest
  • (Optica Publishing Group, 2007),
  • paper CM_1

Silicon micro- and nanostructures formed by femtosecond laser pulses

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Abstract

Femtosecond laser irradiation of solid surfaces attracts a great attention due to its special features, first of all its energy dissipation, which primarily occurs after the termination of a laser pulse. The formation of periodic surface microstructures [1,2] by the interference of incident and surface electromagnetic waves is widely used. However, the possibility of forming structures of size much smaller than the light wavelength is of particular interest. The mechanism of formation of such structures lias currently no universally recognized theoretical description. Studies of these processes arc of great importance from the standpoint of the fundamental interactions of superintense laser radiation with matter, as well as for possible applications. In our work the silicon surfaces structured by femtosecond laser pulses have been investigated by the scanning electron microscopy (SEM), atomic-force microscopy (AFM). third-harmonic (TH) generation, photoluminescence (PL), and Raman spectroscopy techniques.

© 2007 IEEE

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