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Optica Publishing Group
  • CLEO/Europe and EQEC 2009 Conference Digest
  • (Optica Publishing Group, 2009),
  • paper CE4_6

Sub-Micron Period Relief Grating Structures Inscribed on Erbium Doped Ta2O5 Waveguides Using 213 nm, 150 ps Laser Radiation

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Abstract

Tantalum Pentoxide (Ta2O5) films exhibit high refractive index (2.1 @ 1550 nm), transparency between 300 nm and 2000 nm wavelengths, compatibility with silicon processing techniques and high photosensitivity [1], making them ideal for realising compact multifunctional planar lightwave circuits (PLCs).

© 2009 IEEE

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