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  • CLEO/Europe and EQEC 2009 Conference Digest
  • (Optica Publishing Group, 2009),
  • paper CE5_3

Fabrication of Submicron Si Spheres on SOI platform by Using Excimer Laser Reformation Technique

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Abstract

Microspheres support ultra-low-loss whispering-gallery modes (WGMs) when evanescently excited from adjacent waveguiding structures. The high quality factor (Q-factor) and small mode volume associated with WGMs makes the microspheres suitable for numerous optical devices [1-5]. However, most of the research with spherical structures is based on noncrystalline materials such as glass or polymers [6,7]. Little literature reported microspheres on crystalline materials in the past. Since silicon is the dominating material in current integrated circuit industry, fabricating microspheres on a Si-based substrate contributes to compact and low-cost photonics for mass-market applications. Here, we present a technique applying the homogenized KrF excimer laser reformation to fabricate crystalline Si spheres on the SOI platform.

© 2009 IEEE

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