Abstract
We report on a pressure sensor consisting of a Photonic Integrated Circuit (PIC) in Silicon-On-Insulator (SOI) technology. The fabrication process is CMOS-compatible, in the spirit of the 'More than Moore' concept. The device size is 1x1 mm including the fibre coupling interfaces. Applications of this type of sensors are wide-spread. Our main interest is in medical applications, where SOI-based pressure sensors can accommodate the need for high sensitivity and small size.
© 2009 IEEE
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