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Optica Publishing Group
  • CLEO/Europe and EQEC 2009 Conference Digest
  • (Optica Publishing Group, 2009),
  • paper CM3_1

Ultrafast laser processing of glass for MEMS and micro-fluidic applications

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Abstract

Microsystems perform sophisticated tasks in miniaturized volumes. Shaping or analyzing light signals, mixing ultra-small volumes of chemicals, sensing mechanical signals, manipulating micro-objects, sequencing bio-molecules are common operations that can be done by these tiny machines. To further advance the field, there is a growing interest for integrated manufacturing platform where optics, fluid handling capabilities or micro-mechanical elements can be combined.

© 2009 IEEE

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