Abstract
Miniaturization of optical components is one major task for the further development of high tech equipment. Perfect single crystals or glasses can be structured with femtosecond-lasers. Thus e.g. waveguides can be created and used as laser resonator [1-3]. In order to improve performance it is necessary to obtain detailed information about the local physical properties in the patterned area and its surrounding. While the bulk properties of a crystal are well known it is very difficult to obtain information about basic physical quantities like crystal structure, density and refractive index in the patterned area.
© 2009 IEEE
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