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Conferences > CLEO_Europe > 2011 > CE5 > CE5_1
  • CLEO/Europe and EQEC 2011 Conference Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2011),
  • paper CE5_1

Electromechano-optically tuned ring resonator in silicon on insulator, monolithically integrated with a microcantilever

Lasse J. Kauppinen, Shahina M.C. Abdulla, Gijs J.M. Krijnen, Markus Pollnau, and René M. de Ridder

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Abstract

We demonstrate, for the first time, the use of a monolithically integrated silicon nitride cantilever for tuning a silicon microring resonator over a 50 pm wavelength range by applying 8.5V, without affecting the ring’s Q-factor.

© 2011 Optical Society of America

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