Abstract

Time resolved x-ray pump-probe experiments are in the focus of the molecular and atomic physic. The kHz amplifier systems provide good quality short x-ray pulses for pump-probe measurements - but only a low signal/noise ratio due to the low rep rate. There is a demand for a small compact x-ray source with a good temporal resolution and with high repetition rate. A high power oscillator with a few MHz rep rate can solve the problem. An intra-cavity EUV source based on high harmonic generation (HHG) could deliver fs EUV pulses with high average power. The properly out-coupled EUV pulses can be used for spectroscopy, EUV frequency combs, and imaging and inspection of optical components for EUV lithography also [1-3].

© 2011 Optical Society of America