Abstract
Beam control of VCSELs (Vertical Cavity Surface Emitting Lasers) is a key topic to integrate these laser diodes in microsystems for instrumentation or biomedical application [1]. We report here on a simple method to control dynamically the beam shape of VCSELs devices. Our approach is based on an electro-thermal actuator including a polymer membrane, a heating electrode and a polymer microlens (fig.1 a). The operation principle is the following: the laser beam waist position can be tune thanks to the membrane vertical displacement induced by varying the applied current. Optical and thermo-mechanical optimizations of membrane geometry have been carried out. These studies point out that a vertical deflection of 2µm should be obtained with a thermal gradient of 100°C [2], leading to a corresponding waist displacement of few hundred microns.
© 2011 Optical Society of America
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