Abstract

Microcantilevers are the workhorse for ultra sensitive force sensors and are used in applications such as atomic force microscopy, sensing forces as small as 10pN [1]. In previous work [2] we have demonstrated the first integrated optical glass microcantilever, and we now show for the first time Bragg gratings forming a Fabry-Pérot interferometer acting to increase the force-sensitivity of the device. The fabrication of the glass microcantilever is based on a novel physical micromachining and etching approach, combined with UV written Bragg gratings. The advantages of the in-situ Fabry-Pérot interferometer will also be discussed.

© 2011 Optical Society of America