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Proton beam writing (PBW) has recently attracted much attention as a next-generation micro-fabrication technology [1]. It is a direct-drawing technique and does not need any masks to transfer micro-patterns to the surfaces. Furthermore, the importance of planar polymer optical waveguides is recently increasing in fields such as optical fiber telecommunication and optical interconnection. In our previous work, we demonstrated single-mode straight-line, Y-junction, and Mach-Zehnder (MZ) type PMMA-based waveguides fabricated using PBW [2, 3]. In this work, we first attempted to fabricate a MZ type thermo-optic switch [4] utilizing PBW.
© 2013 IEEE
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