Abstract
For several decades, hydrogenated amorphous silicon (a-Si:H) has been playing a significant role in the world’s production of photovoltaic modules. In this work, we investigate different types of modifications induced by a femtosecond laser in a-Si:H thin films. We demonstrate that several distinctive modification regimes with peculiar optical properties can be obtained in a narrow range of the laser pulse energies.
© 2013 IEEE
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